نام محصول:
منبع تغذیه DC/DC
نام انگلیسی:
DC/DC power supply AE Pinnacle Plus+ series
برند:
Kurt J Lesker
مشخصات:
AE Pinnacle Plus+ Series
Advanced Energy’s Pinnacle Plus+ power supply provides all of the advantages of a pulsed-DC solution for your reactive processes— in a one-box package that delivers additional benefits in the form of ease of use, cost savings, and superior flexibility. Combining standard DC technology and process-proven pulsed-DC technology patented by AE in the 1990s, the Pinnacle Plus+ power supply provides higher deposition rates, more repeatable performance, and exceptional film quality compared to complicated and expensive AC-power solutions. The Pinnacle Plus+ product line consists of single-output 5kW and 10kW models, as well as a dual-output 5kW model.
Features:
Compact package
Adjustable frequency range from 5 kHz to 350 kHz
Variable duty cycle up to 45%
Wide voltage and impedance ranges (single-tap)
Superior arc control
Dual output for multichamber use
Reactive sputtering closed-loop control
توضیحات:
Type
DC/DC
Output
single-output, dual-output, adjustable
Features
compact
Input voltage
115 V, 208 V
Power
1,000 W, 2,000 W, 5,000 W, 10,000 W
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