Characteristics:

Combination of a three axis translation system and a two axis tilting system
Free center hole with 17 mm diameter
Integrated preload
Translation of each axis: up to 100 µm
Tilt in each direction: ±2 mrad
Solid state flexure hinges in parallelogram design without mechanical play
Option: integrated measurement system

Optical stages often require an open central space (e.g. for passing light). For such applications, the PENTOR translation and tilting system was developed with a 17 mm free center hole. It offers a motion the in x-, y- and z-directions of 100 µm and a tilt of ±2 mrad on two orthogonal axes (j,q).

Flexure hinges for the three translation axes guarantee the highest degree of parallelism over the travel range of this stage. Each axis has a built-in integrated mechanical preload, making the 5-axis piezo positioner PENTOR very well suited for dynamic applications. The tilting part is designed for plus-minus tilting.

Orientation : XY, Z-axis
Type : electric
Number of axes : 5-axis
Other characteristics : high-accuracy
Stroke : Max.: