Wafer inspection systemGWI

The GWI System was build to detect defects in glass wafers early in the production cycle. The system is based on a high resolution smart camera to meet the required accuracy in defect detection.

The complete evaluation of the wafer is done in the smart camera. The picture of the glass wafer is taken and is processed immediately in the camera. The resulting data and images are transferred to the PLC.

There is also an option to connect a display to the camera to see the results on the screen.

To run the evaluation process the Ethernet, RS232 and Power I/O connection is available. The Power I/O contains also the RS232 interface.

The GWI System detects surface errors of glass wafers such as scratches, particles and substrate errors.

Applications : for wafers
Type : glass surface