The Multiband plasma-process monitor C10346-01 is a system specifically designed for monitoring the optical plasma emissions that are created during the various manufacturing processes of semiconductors including etching, sputtering, cleaning, and CVD. The MPM can handle multichannel recording in real-time.

Specifications
Type number : C10346-01
Wavelength range : 200 nm to 950 nm
Wavelength accuracy : ±0.75 nm
Wavelength resolution (FWHM) : <2 nm Power supply : AC100 V to AC240 V (50 Hz/60 Hz) Power consumption : Approx. 70 VA Digital output terminal (Determinate signal output) : TTL maximum 5 channels (3 channels maximum when measurement trigger signal is used Digital input terminal (starting measurement trigger signal) : TTL 1 channel Using TTL 5 channel Digital output terminal (Busy signal) : TTL 1 channel Using TTL 4 channel Analog output terminal : 2 channels 0 V to 10 V Fiber probe connector : SMA Communicate interface : USB 2.0 Type B Ambient operating temperature : +10 ˚C to +30 ˚C Applications : process, emissions, plasma Interface : USB 2.0 Other characteristics : real-time