Automated Plasma Cleaning

SCI Automation focuses on the design and manufacturing of integrated plasma (or vacuum)systems. These best-in-class systems are used around the world in vacuum and plasma applications where automation is required in vacuum, pressurized, or controlled atmosphere environments. This plasma automation includes batch load or full automation (material movement and tracking). SCI’s product suite includes plasma cleaning and activation for the following applications and markets:

semiconductor applications
electronic applications
automotive applications
optoelectronic applications
hybrid applications
medical applications
SCI specializes in…

Integrated plasma or vacuum systems
Vacuum and plasma applications
Applications where automation is required in vacuum or pressurized or controlled atmosphere environments
Automation for material movement and tracking
Automated welding applications
Custom automation for the semiconductor, automotive, and related industries
Applications for die sorting and binning
LED on wafer with spectrophotometer measurements
Wafer scanning for defect control and mapping

Technology : plasma
Operational mode : manual
Applications : medical