Optical inspection systemImperia®

With its unique optical design technology, the Imperia system detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring.

Product Overview

With unique optical design technology, the Imperia system detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. Combining these two post-epitaxial metrology screening functions into a single high throughput system minimizes valuable fab space use and cassette handling time. This product can provide significant economic savings to the user (for example: accurately predicting MOCVD reactor yield and PM schedules).

High density spectral PL mapping
Defect analysis and classification
Epitaxial layer thickness and normalized reflectivity imaging at high resolution
Wafer shape profiling and 3D bow reconstruction

Technology : optical, 3D
Operational mode : automated
Applications : for wafers
Type : for defect detection