Leak detection spectrometerPrismaPro®

Quadrupole mass spectrometers with Faraday detectors are the preferred devices for qualitative analysis of the gas composition in a high-vacuum chamber.

Compared with vacuum gauges, quadrupole mass spectrometers offer a much greater wealth of information about the vacuum. A Faraday detector is often sufficient to obtain information about leaks, the release of water vapor or contamination with hydrocarbons under high vacuum. For this purpose, Pfeiffer Vacuum offers a range of quadrupole mass spectrometers with a variety of mass ranges and filament materials.

Type : quadrupole
Field : industrial, for environmental analysis, for research and development, for leak detection, for the semiconductor industry
Configuration : compact, modular