Ion sourceFDG15

Specification
Energy range
400 eV to 5 keV (10 eV optional)

Max. beam current
> 10 μA @ 5 keV
> 100 nA @ 15 eV (10 eV option)

Beam diameter
between 300 μm and 2′′ @ 5 keV

Integral Port Aligner
Yes

Cathode
Yttrium oxide coated Tungsten
(optional) Iridium filament

Working distance
30 mm – 300 mm

Insertion depth
173 mm

Chamber pressure during operation
5×10-7 mbar – 1×10-8mbar

Mounting flange
CF 35 / 2¾′′ OD

Electronics Interface
TCP/IP

Software control
LabVIEW™- based Software “ProIon”

The FDG 15 uses the same proven beam generation as the FDG 150 and can be used as a substitute for all applications where e.g. the wide spread but no longer available ISE 10 (Leybold/Kremer/OMICRON) has been used in the past.

In addition the FDG 15 comes with a more flexible ion optics to adjust for longer working distances and an optional ion flux stabilization.

Applications : laboratory
Material : ceramic, aluminum, coated
Other characteristics : analog, precision