EMCP plasma engraving systemE-6000 Series

Rapid increases in aerial densities of HDD (Hard Disk Drive) requires advanced patterning solutions for thin film head production.
This brings leading-edge semiconductor processes into the HDD industry as a breakthrough. Magnetic Head Etch System E-6000 Series: the EMCP (Electro Magnetically Coupled Plasma) etch system provides superior performance in profile control as well as in higher etching rate and selectivity compared to conventional ion-milling processes.

Technique : EMCP plasma
Applications : for non-volatile materials