CD-SEM inspection machineCD-SEM CG5000

New CD-SEM designed for sub-22nm technology node and beyond.

Advanced CD Measurement SEM CG5000 (HITACHI CD-SEM) delivers High-Resolution, High-Throughput and High-Repeatability by utilizing improved electron optics, advanced image processing and new wafer transfer system.
CG5000 is also capable of enhanced automatic calibration, providing long-term stability.
In addition, CD-SEM CG5000 has new applications and measurement techniques to be able to meet measurement challenges for new process and new materials for 1Xnm process development.

Technology : CD-SEM
Applications : for wafers
Other characteristics : measurement, high-resolution, high-throughput