Liquid filterPlanarcap® LPX

Planarcap® LPX Disposable Filters
Point-of-use disposable filters for silica and alumina abrasives for oxide and copper CMP

Designed for use with silica and alumina slurry solutions – most typically used in copper, ILD, STI and tungsten CMP applications
Available in a wide range of retention ratings from 1 µm to 5 µm
Meets the needs of point-of-use CMP slurry filtration applications
Available as a disposable filters with Flaretek® fittings
All-polypropylene construction with pleated filtration media

Materials:
Medium: Pleated depth polypropylene

Core, cage and shell: Polypropylene
Connections:
Inlet/outlet: 3/8” or 1/4” Flaretek® fitting

Vent/drain: 1/4” Flaretek® fitting*
Maximum operating conditions:
Maximum operating pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C

Maximum forward/reverse differential pressure 0.27 MPa (2.7 bar, 40 PSID) at 20°C

Maximum operating temperature: 40°C (104°F)
Notes:
*Part number SKNP 010L2F is available with 1/8” MNPT vent/drain

Designed for : liquid
Filtration element : capsule
Applications : depth
Fluid specification : for slurry
Other characteristics : disposable, pleated
Filtration size : Min.:
Operating pressure : 2.7 bar (39.16 psi)